Model based investigation of Ar+ ion damage in DC magnetron...

Surface and Coatings Technology 2014 / 02 Vol. 241

Model based investigation of Ar+ ion damage in DC magnetron sputtering

Siemers, Michael, Pflug, Andreas, Melzig, Thomas, Gehrke, Kai, Weimar, Andreas, Szyszka, Bernd
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Volume:
241
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.09.025
Date:
February, 2014
File:
PDF, 816 KB
english, 2014
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