Coating of DLC film by pulsed discharge plasma CVD

Coating of DLC film by pulsed discharge plasma CVD

Noda, M., Umeno, M.
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Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2005.09.009
Date:
November, 2005
File:
PDF, 159 KB
english, 2005
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