[AIP FRONTIERS IN PHYSICS: 3rd International Meeting - Kuala Lumpur (Malaysia) (12–16 January 2009)] AIP Conference Proceedings - Deposition Of Materials Using A Simple Planar Coil Radio Frequency Inductively Coupled Plasma System
Ng, K. H., Wong, C. S., Yap, S. L., Gan, S. N., Chia, Swee-Ping, Ratnavelu, Kurunathan, Muhamad, Muhamad RasatYear:
2009
Language:
english
DOI:
10.1063/1.3192288
File:
PDF, 837 KB
english, 2009