Electrical matching of low power piezoelectric ultrasonic...

Electrical matching of low power piezoelectric ultrasonic transducers for microelectronic bonding

Zhang, Hongjie, Wang, Fujun, Tian, Yanling, Zhao, Xingyu, Zhang, Dawei, Han, Lin
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Volume:
199
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.05.028
Date:
September, 2013
File:
PDF, 3.82 MB
english, 2013
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