Diamond-like carbon films deposited using a broad, uniform...

Diamond and Related Materials 1998 / 7 Vol. 7; Iss. 7

Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH4-plasma source

Druz, B., Ostan, E., Distefano, S., Hayes, A., Kanarov, V., Polyakov, V., Rukovishnikov, A., Rossukanyi, N., Khomich, A.
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Volume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00338-5
Date:
July, 1998
File:
PDF, 676 KB
english, 1998
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