![](/img/cover-not-exists.png)
Surface Reactions in Microelectronics Process Technology
Levitin, Galit, Hess, Dennis W.Volume:
2
Language:
english
Journal:
Annual Review of Chemical and Biomolecular Engineering
DOI:
10.1146/annurev-chembioeng-061010-114249
Date:
July, 2011
File:
PDF, 1.58 MB
english, 2011