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SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Suspended substrate stripline structures evaluation for millimeter-wave circuits application
Fu, Jeffrey S., Lu, Chao, Kwok, Boon C., Lee, Wendy Y., Behringer, Uwe F. W., Uttamchandani, Deepak G.Volume:
4407
Year:
2001
Language:
english
DOI:
10.1117/12.425305
File:
PDF, 231 KB
english, 2001