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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Three dimensional microfluidic design with spincoated micrometer-thin elastomer multilayer
Binh-Khiem, N., Thanh-Vinh, N., Matsumoto, K., Shimoyama, I.Year:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170356
File:
PDF, 7.79 MB
english, 2012