[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Effect of air damping on the dynamics of nonuniform deformations of microstructures
Yao-Joe Yang,, Gretillat, M.-A., Senturia, S.D.Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/SENSOR.1997.635390
File:
PDF, 494 KB
english, 1997