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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Integrated carbon nanotube arrays for reliable contact in electromechanical memory device
Choi, Jungwook, Eun, Youngkee, Kim, JongbaegYear:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170400
File:
PDF, 2.20 MB
english, 2012