Low-loss Ba[sub 0.5]Sr[sub 0.5]TiO[sub 3] thin films by inverted cylindrical magnetron sputtering
Cukauskas, E. J., Kirchoefer, Steven W., Pond, J. M.Volume:
88
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1289052
File:
PDF, 461 KB
english, 2000