CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY OF DEFORMED MICROSTRUCTURES IN MONOLITHIC AND MULTILAYER TiSiN/TiN FILMS
WO, P. C., MUNROE, P. R., ZHOU, Z. F., XIE, Z. H., LI, K. Y.Volume:
24
Language:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/S0217979210063934
Date:
January, 2010
File:
PDF, 1.37 MB
english, 2010