Nanoscale displacement sensing using microfabricated...

Applied Physics Letters 2013 Vol. 103; Iss. 14

Nanoscale displacement sensing using microfabricated variable-inductance planar coils

Coskun, M. Bulut, Thotahewa, Kasun, Ying, York-Sing, Yuce, Mehmet, Neild, Adrian, Alan, Tuncay
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Volume:
103
Year:
2013
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4823828
File:
PDF, 1.14 MB
english, 2013
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