[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Porous Parylene and effects of liquid on Parylene films deposited on liquid
Binh-Khiem, Nguyen, Matsumoto, Kiyoshi, Shimoyama, IsaoYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734374
File:
PDF, 4.65 MB
english, 2011