[IEEE 2011 IEEE 24th International Conference on Micro...

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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Porous Parylene and effects of liquid on Parylene films deposited on liquid

Binh-Khiem, Nguyen, Matsumoto, Kiyoshi, Shimoyama, Isao
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Year:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734374
File:
PDF, 4.65 MB
english, 2011
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