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[IEEE Nanophotonics - Sapporo, Japan (2010.08.9-2010.08.12)] 2010 International Conference on Optical MEMS and Nanophotonics - Nanostructured origami™ folding of patternable resist for 3D lithography
Yang, Se Young, Choi, Hyung-ryul Johnny, Deterre, Martin, Barbastathis, GeorgeYear:
2010
Language:
english
DOI:
10.1109/OMEMS.2010.5672197
File:
PDF, 1.27 MB
english, 2010