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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Dry etching of single crystal PMN-PT piezoelectric material
Agnus, Joel, Ivan, Ioan Alexandru, Queste, SamuelYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734405
File:
PDF, 1.16 MB
english, 2011