Secondary ion mass spectrometry on the helium ion...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 6

Secondary ion mass spectrometry on the helium ion microscope: A feasibility study of ion extraction

Dowsett, David, Wirtz, Tom, Vanhove, Nico, Pillatsch, Lex, Sijbrandij, Sybren, Notte, John
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4754309
File:
PDF, 2.07 MB
english, 2012
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