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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - PDMS through-hole fabrication by soft lithography using CH
Choi, Jongchan, Lee, Kyeong-Hwan, Choi, Ji A, Lee, Sun Hwa, Yang, SungYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734422
File:
PDF, 882 KB
english, 2011