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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Nonlinear piezoresistance of silicon at large stresses
Gaspar, J., Gutmann, J., Lemke, B., Paul, O.Year:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734463
File:
PDF, 1.38 MB
english, 2011