A Gap-Closing Electrostatic Actuator With a Linear Extended Range
Shmulevich, Shai, Rivlin, Ben, Hotzen, Inbar, Elata, DavidVolume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2013.2276027
Date:
October, 2013
File:
PDF, 609 KB
english, 2013