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[IEEE 2013 IEEE International Conference on Mechatronics and Automation (ICMA) - Takamatsu, Kagawa, Japan (2013.08.4-2013.08.7)] 2013 IEEE International Conference on Mechatronics and Automation - Vibration suppression control for multiaxis table drive system
Tsuruta, Kazuhiro, Ojiro, Tetsuya, Ushimi, Nobuhiro, Shibata, HiroshiYear:
2013
Language:
english
DOI:
10.1109/ICMA.2013.6618074
File:
PDF, 1.09 MB
english, 2013