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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Gamma irradiation effects on resistance of surface micromachined polycrystalline silicon beams in MEMS
Wang, Lei, Tang, Jieying, Song, Jing, Huang, Qing-AnYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734457
File:
PDF, 898 KB
english, 2011