[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Fracture toughness of si thin film at very low temperatures by tensile test
Ando, T., Takumi, T., Nozue, S., Sato, K.Year:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734455
File:
PDF, 1.24 MB
english, 2011