Video analysis of inclusion induced macroparticle emission from aluminum sputtering targets
Wickersham, C. E., Poole, J. E., Fan, J. S., Zhu, L.Volume:
19
Année:
2001
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1403718
Fichier:
PDF, 701 KB
english, 2001