Level Set Approach to Anisotropic Wet Etching of Silicon

Sensors 2010 / 05 Vol. 10; Iss. 5

Level Set Approach to Anisotropic Wet Etching of Silicon

Radjenović, Branislav, Radmilović-Radjenović, Marija, Mitrić, Miodrag
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Volume:
10
Language:
english
Journal:
Sensors
DOI:
10.3390/s100504950
Date:
May, 2010
File:
PDF, 743 KB
english, 2010
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