Deposition of c-BN films in a hollow cathode arc...

Diamond and Related Materials 1996 / 11 Vol. 5; Iss. 11

Deposition of c-BN films in a hollow cathode arc evaporation device

Barth, K.-L., Neuffer, A., Ulmer, J., Lunk, A.
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Volume:
5
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(96)00544-4
Date:
November, 1996
File:
PDF, 423 KB
english, 1996
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