![](/img/cover-not-exists.png)
Deposition of c-BN films in a hollow cathode arc evaporation device
Barth, K.-L., Neuffer, A., Ulmer, J., Lunk, A.Volume:
5
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(96)00544-4
Date:
November, 1996
File:
PDF, 423 KB
english, 1996