A Test Circuit for Extremely Low Gate Leakage Current...

IEEE Transactions on Semiconductor Manufacturing 2013 / 08 Vol. 26; Iss. 3

A Test Circuit for Extremely Low Gate Leakage Current Measurement of 10 aA for 80 000 MOSFETs in 80 s

Inatsuka, Takuya, Kumagai, Yuki, Kuroda, Rihito, Teramoto, Akinobu, Suwa, Tomoyuki, Sugawa, Shigetoshi, Ohmi, Tadahiro
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Volume:
26
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2013.2260568
Date:
August, 2013
File:
PDF, 952 KB
english, 2013
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