Microstructure and stress investigations of cubic boron nitride thin films
Ilias, S., Stambouli, V., Pascallon, J., Bouchier, D., Nouet, G.Volume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00226-4
Date:
February, 1998
File:
PDF, 1.52 MB
english, 1998