[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips
Walter, B., Faucher, M., Mairiaux, E., Xiong, Z., Buchaillot, L., Legrand, B.Year:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734475
File:
PDF, 1.23 MB
english, 2011