[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Strain rate dependence of mechanical properties for sub 100 nm-thick Au film using Electrostatically Actuated NAno Tensile testing device
Oh, Hyun-Jin, Hanasaki, Itsuo, Isono, Yoshitada, Han, Seung-Woo, Lee, Hak-JooYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734469
File:
PDF, 1.45 MB
english, 2011