Design, fabrication and characterization of a capacitive...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2005 / 12 Vol. 52; Iss. 12

Design, fabrication and characterization of a capacitive micromachined ultrasonic probe for medical imaging

Caliano, G., Carotenuto, R., Cianci, E., Foglietti, V., Caronti, A., Iula, A., Pappalardo, M.
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Volume:
52
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/TUFFC.2005.1563268
Date:
December, 2005
File:
PDF, 1.58 MB
english, 2005
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