In situ Reaction Mechanism Studies on Atomic Layer...

In situ Reaction Mechanism Studies on Atomic Layer Deposition of Ir and IrO 2 from Ir(acac) 3

Knapas, Kjell, Ritala, Mikko
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm103490v
Date:
June, 2011
File:
PDF, 849 KB
english, 2011
Conversion to is in progress
Conversion to is failed