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In situ Reaction Mechanism Studies on Atomic Layer Deposition of Ir and IrO 2 from Ir(acac) 3
Knapas, Kjell, Ritala, MikkoVolume:
23
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm103490v
Date:
June, 2011
File:
PDF, 849 KB
english, 2011