Actinometry of inductively coupled Cl[sub 2]âN[sub 2] plasmas for dry etching of GaAs
BruÌckl, Tobias, Zull, HeribertVolume:
98
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1994932
File:
PDF, 401 KB
english, 2005