Actinometry of inductively coupled Cl[sub 2]∕N[sub 2]...

Actinometry of inductively coupled Cl[sub 2]∕N[sub 2] plasmas for dry etching of GaAs

Brückl, Tobias, Zull, Heribert
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Volume:
98
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1994932
File:
PDF, 401 KB
english, 2005
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