Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2009 Vol. 27; Iss. 5
Effect of sidewall passivation in BCl[sub 3]âN[sub 2] inductively coupled plasma etching of two-dimensional GaAs photonic crystals
Atlasov, Kirill A., Gallo, Pascal, Rudra, Alok, Dwir, Benjamin, Kapon, EliVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3205004
File:
PDF, 697 KB
english, 2009