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An electrostatic field sensor operated by self-excited vibration of MEMS-based self-sensitive piezoelectric microcantilevers
Kobayashi, T., Oyama, S., Makimoto, N., Okada, H., Itoh, T., Maeda, R.Volume:
198
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.04.016
Date:
August, 2013
File:
PDF, 1.07 MB
english, 2013