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Ion flux characteristics in high-power pulsed magnetron sputtering discharges
Vlček, J, Kudláček, P, Burcalová, K, Musil, JVolume:
77
Language:
english
Journal:
Europhysics Letters (EPL)
DOI:
10.1209/0295-5075/77/45002
Date:
February, 2007
File:
PDF, 372 KB
english, 2007