SPIE Proceedings [SPIE Optical Systems Design - Glasgow, Scotland, United Kingdom (Monday 1 September 2008)] Advances in Optical Thin Films III - New developments in magnetron sputter processes for precision optics
Vergöhl, Michael, Werner, Oliver, Bruns, Stefan, Kaiser, Norbert, Lequime, Michel, Macleod, H. AngusVolume:
7101
Year:
2008
Language:
english
DOI:
10.1117/12.797190
File:
PDF, 429 KB
english, 2008