Hysteresis-free deposition of niobium oxide films by HiPIMS using different pulse management strategies
Hála, M, Čapek, J, Zabeida, O, Klemberg-Sapieha, J E, Martinu, LVolume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/5/055204
Date:
February, 2012
File:
PDF, 1.16 MB
english, 2012