[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - Simulation and analysis of low-energy electron beam lithography on topographical substrates
Wu, Peng, Zhou, Zai-Fa, Pan, Jiang-Yong, Gan, Qi, Xu, Wen-QinYear:
2012
Language:
english
DOI:
10.1109/ICSICT.2012.6467867
File:
PDF, 308 KB
english, 2012