Study of thermophysical properties of crystalline silicon...

Applied Surface Science 2014 / 05 Vol. 302

Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers

Gavrylyuk, O.O., Semchyk, O.Yu., Bratus, O.L., Evtukh, A.A., Steblova, O.V., Fedorenko, L.L.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
302
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.09.171
Date:
May, 2014
File:
PDF, 334 KB
english, 2014
Conversion to is in progress
Conversion to is failed