Fabricating process of hollow out-of-plane Ni microneedle...

Journal of Micro/Nanolithography MEMS and MOEMS 2013 / 09 Vol. 12; Iss. 3

Fabricating process of hollow out-of-plane Ni microneedle arrays and properties of the integrated microfluidic device

Zhu, Jun, Cao, Ying, Wang, Hong, Li, Yigui, Chen, Xiang, Chen, Di
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Volume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.12.3.033019
Date:
September, 2013
File:
PDF, 4.38 MB
english, 2013
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