Focused electron beam induced deposition of gold

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2000 Vol. 18; Iss. 6

Focused electron beam induced deposition of gold

Utke, I., Hoffmann, P., Dwir, B., Leifer, K., Kapon, E., Doppelt, P.
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Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1319690
File:
PDF, 766 KB
english, 2000
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