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[IEEE 2010 IEEE Sensors - Waikoloa, HI, USA (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Lateral Field Excitation Film Bulk Acoustic Resonator as infrared sensor
Qiu, Xiaotun, Tang, Rui, Zhu, Jie, Yu, Hongyu, Wang, Ziyu, Oiler, Jon, Yu, HongyuYear:
2010
Language:
english
DOI:
10.1109/ICSENS.2010.5690426
File:
PDF, 604 KB
english, 2010