Three-dimensional proximity effect correction for...

Three-dimensional proximity effect correction for large-scale uniform patterns

Dai, Q., Lee, S.-Y., Lee, S.-H., Kim, B.-G., Cho, H.-K.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3660785
File:
PDF, 1.13 MB
english, 2011
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