Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 6
Three-dimensional proximity effect correction for large-scale uniform patterns
Dai, Q., Lee, S.-Y., Lee, S.-H., Kim, B.-G., Cho, H.-K.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3660785
File:
PDF, 1.13 MB
english, 2011