Characteristics of (Ti,Ta)N thin films prepared by using...

Journal of Physics D Applied Physics 2007 / 07 Vol. 40; Iss. 14

Characteristics of (Ti,Ta)N thin films prepared by using pulsed high energy density plasma

Feng, Wenran, Chen, Guangliang, Li, Li, Lv, Guohua, Zhang, Xianhui, Niu, Erwu, Liu, Chizi, Yang, Si-ze
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Volume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/14/018
Date:
July, 2007
File:
PDF, 456 KB
english, 2007
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