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From amorphous to microcrystalline silicon: Moving from one to the other by halogenated silicon plasma chemistry
Bruno, Giovanni, Capezzuto, Pio, Giangregorio, Maria M., Bianco, Giuseppe V., Losurdo, MariaVolume:
89
Language:
english
Journal:
Philosophical Magazine
DOI:
10.1080/14786430903070928
Date:
October, 2009
File:
PDF, 1.59 MB
english, 2009