[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - High-density pMUT array for 3-D ultrasonic imaging based on reverse-bonding structure
Wang, Yu-Feng, Ren, Tian-Ling, Yang, Yi, Chen, Hao, Zhou, Chang-Jian, Wang, Li-Gang, Liu, Li-TianYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734605
File:
PDF, 1.01 MB
english, 2011