[IEEE 2011 IEEE 24th International Conference on Micro...

  • Main
  • [IEEE 2011 IEEE 24th International...

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Fabrication and testing of a large area, high density, parylene MEMS

Ledochowitsch, P., Felus, R. J., Gibboni, R. R., Miyakawa, A., Bao, S., Maharbiz, M. M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734604
File:
PDF, 3.95 MB
english, 2011
Conversion to is in progress
Conversion to is failed