[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Fabrication and testing of a large area, high density, parylene MEMS
Ledochowitsch, P., Felus, R. J., Gibboni, R. R., Miyakawa, A., Bao, S., Maharbiz, M. M.Year:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734604
File:
PDF, 3.95 MB
english, 2011