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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Microfabricated pressure sensing particles with integrated retroreflectors
Chalasani, S., Xie, Y., Mastrangelo, C. H.Year:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734636
File:
PDF, 3.57 MB
english, 2011