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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - A simple all-parylene in-channel pop-up checkvalve with controllable cracking pressure
Lin, Jeffrey Chun-Hui, Kang, Clark Dongyang, Tai, Yu-ChongYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734619
File:
PDF, 1013 KB
english, 2011